Applications
• Plasma Etch
• CVD,PVD
• Sputtering
• Coating
• Ultrasonics
• Induction Heating
• Laser Drivers
• E-Beam Evaporation
• Other Thin Flim Processes
2.1 RF Broadband Amplifiers
• Linear Power
• Operations Into Any Loads
• Broad Bandwidth
• Pulse Operation
• All Solid State
2.2 RF Plasma Generators
• Flexiblity for Variety of Frequency
• Compact Design
• Repeatability/Accuracy
• Unconditional/RF Stability
• Soild State Design
2.3 DC Plasma Generators
• DC Power Supplies
• Pulsed DC Power Supplies
• Bias DC Power Supplies
• Arc Cathode DC Power Supplies
2.4 RF Impedance Match Networks
• Preset-in Controller for easy Plasma Ignition
• Lightweight Manual & Auto Tune Controller (2.5 lbs)
• Accepts 110-240 VAC without tap changes
• Series LC network allows wide range impedance tuning
2.5 Electron Beam Evaporators ( E-Gun Systems)
• Single & Multi Hearth
• Power Supplies
• Controllers
• Feedthroughs

2.6 RF Leakage Detector

Measurement of ambient fields and location of radiation sources
The C.A 43 field intensity meter offers an efficient solution to Electromagnetic Compatibility (EMC), it enables the emissivity of radiant equipment to be determined or the measurement of an ambient field in a sensitive environment.
• wide band: 100kHz to 2.5GHz (indicative value between 100kHz and 1MHz)
• electrical field: 0.1 to 200V/m
• power density: 0.1 to 2mW/cm2
• measurement of 1ms peak
• configurable alarm threshold
• EF1 polarisation probe
• EF2A isotropic probe
• memory function
• digital output on optic fibre (RS 232)
• EMIGRAPH software (under Windows)
• dimensions: 216 x 72 x 37mm - weight: 350g
2.7 RF Plasma Impedance Analyzer (V/I Probe)

2.8 RF Cables

2.9 RF Connectors
2.10 Chamber Leakage Detector (PICO)