4.1 Field Service (AMAT Models) Troubleshooting Guides

•  For AMAT Centura DPS Metal Etcher

  • Source RF Generator: ENI GMW25A
  • ( GMW25A part 1/2 Download
  •(GMW25A part 2/2 Download
  • Bias RF Generator: ENI OEM-12B3-08

•  For AMAT Super E Oxide Etcher

   •  RF Generator: ENI OEM-28B-02

•  For AMAT Centura DPS Poly Etcher
   •  RF Generator: ENI OEM-12B3-02
•  If you need the troubleshooting guides, please contact service@ashern.com.tw .
4. 2 FAQ

•  What is Plasma?

A fourth state of matter -- not a solid, liquid or gas. In a plasma, the electrons are pulled free from the atoms and can move independently. The individual atoms are charged, even though the total number of positive and negative charges is equal, maintaining an overall electrical neutrality.
•  What is RF?
Radio Frequency (RF) waves are the means by which almost all wireless communication takes place - TV, radio, cellular phone, cordless phone or two-way radio. The most common used frequency for semiconductor processes is 13.56MHz.
•  Why is an impedance of 50 ohms most commonly used for RF coaxial connectors?
An impedance of 50 ohms provides the optimum performance compromise between maximum power handling capability and lowest attenuation which are roughly 30 ohms and 77 ohms respectively.